Isolated micro pressure sensor and method for making the same

Details Isolated micro pressure sensor and method for making the same Isolated micro pressure sensor and method for making the same

2005-06-28

2005-06-28

CyGan, Michael (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

Reexamination Certificate

active

06910383

ABSTRACT:
A micro pressure sensor comprising a glass substrate or a bulk silicon wafer with a rampart protruding from the surface and a plurality of first contacting pads, a thin membrane having a plurality of piezo-resistors, circuit patterns, and a plurality of second contact pads, and conducting lines, wherein the plurality of contact pads are partially exposed to outside. The rampart on the substrate has a cavity formed on the center of the top surface of the rampart. The top surface of the rampart is tightly bonded to the surface of the thin membrane. The piezo-resistors are sealed in the cavity. Preferably, the micro sensor further comprises a plurality of thermo sensors, and a plurality of temperature-controlling elements all enclosed inside the cavity, and additional protective layers formed on the exposure regions of all contact pads.

REFERENCES:
patent: 5305643 (1994-04-01), Thomas et al.
patent: 6012335 (2000-01-01), Bashir et al.
patent: 6308575 (2001-10-01), Yang et al.

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