Radiant energy – Invisible radiant energy responsive electric signalling – Ultraviolet light responsive means
Reexamination Certificate
2008-05-27
2008-05-27
Sung, Christine (Department: 2884)
Radiant energy
Invisible radiant energy responsive electric signalling
Ultraviolet light responsive means
Reexamination Certificate
active
07378666
ABSTRACT:
The invention concerns an irradiation device for testing objects coated with light-sensitive paint, comprising a EUV radiation source, an optical system for filtering the radiation of the EUV radiation source a chamber for receiving the object, as well as systems for intersecting the trajectory of the rays on the object. The invention also concerns a method for operating such a device. The invention aims at obtaining as quickly as possible an illumination at least partly simultaneous of several irradiation fields, with different doses, by using an inexpensive laboratory radiation source without resorting to complex optical systems. Therefor, the invention provides a device comprising a simplified and compact optical system, with closable diaphragm apertures located in front of the object to be irradiated and at least one control sensor placed on the trajectory of the rays and enabling the radiation dose to be measured.
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Domke Wolf-Dieter
Juschkin Larissa
Kragler Karl
Lebert Rainer
Meisen Manfred
AIXUV GmbH
Qimonda AG
Slater & Matsil L.L.P.
Sung Christine
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