Irradiation cross-linkable thermostable polymer system, for micr

Details Irradiation cross-linkable thermostable polymer system, for micr Irradiation cross-linkable thermostable polymer system, for micr

1987-09-04

1989-10-24

Michl, Paul R.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

526245, 526246, 526244, 528271, 522 97, 522181, 522168, 522182, 522100, 430285, 430288, C08F 1418

Patent

active

048763225

ABSTRACT:
Linear fluorooligomers having at least two reactive end groups per polymer molecule are incorporated into radiation sensitive polymer systems which have improved continuous temperature resistance and low dielectric constant. The polymer systems can be applied as lacquers. Preferably perfluorated poly-ethers and perfluorated alkanes are used as starting compounds. The polymeric product is usable as a coating for the production of printed multi-layer wirings and economises on through-bores and additional copper intermediate layers. A further field of application exists in the field of integrated semiconductor circuits in VLSI-technology for the production of negative photo-resists.

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Blodget, "Spektrum Der Wissenschaft", Sep. 1983, pp. 94-106.
Eisenbach, "Angewandte Makromolekulare Chemie" (1982), pp. 101-111.

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