Ionization vacuum gauge with emission of electrons in parallel p

Electricity: measuring and testing – Using ionization effects

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324462, 3133631, G01L 2132, H05H 1500

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active

051286173

ABSTRACT:
An ionization gauge and controller therefor where the gauge has a sensitivity which is reproducible gauge to gauge and stable over time in the same gauge. An ionization gauge with a very much lower and a somewhat higher pressure limit than prior art gauges is also disclosed. Elements are also described for launching all electrons in a tight beam in Bayard-Alpert type geometry, so that all the conditions for reproducible and stable sensitivity are satisfied. Elements are also described for collecting all electrons at low energy so that soft X-ray production is negligible.

REFERENCES:
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patent: 3743876 (1973-07-01), Redhead
patent: 3839655 (1974-10-01), Helgeland et al.
patent: 4093913 (1978-06-01), O'Neal, III
patent: 4636680 (1987-01-01), Bills et al.
patent: 4714891 (1987-12-01), Morrison, Jr.
K. E. McCulloh & C. R. Tilford, J. Vac. Sci. Technol, 18 994 (1981).
L. G. Pittaway, J. Phys. D. Appl. Phys. 3 1113 (1970).
K. F. Poulter et al., J. Vac. Sci. Technol. 17 679 (1980).
West German Patent DE 3042 172A1.
K. F. Poulter et al., Vac/Vol. 31, No. 3, pp. 147-150 (1981).
Paul Redhead et al., "Physical Basis of Ultra-High Vacuum", (1968) pp. 234-239.

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