Ionization vacuum gauge using a cold micropoint cathode

Details Ionization vacuum gauge using a cold micropoint cathode Ionization vacuum gauge using a cold micropoint cathode

1992-07-20

1994-01-11

Strecker, Gerard P.

Electricity: measuring and testing

Using ionization effects

For monitoring pressure

313309, 313336, G01L 2134, G01N 2770, H01J 130, H01J 1924

Patent

active

052785106

ABSTRACT:
Ionization vacuum gauge comprising, like Bayard Alpert gauges, in a chamber (1) containing an extremely low pressure atmosphere, whose ultra-vacuum degree it is desired to be measured, an electron source cathode (2), a grid (3) for collecting these electrons and surrounding a collector (4) of ions resulting from the impact of the electrons on the gas molecules of the extremely low pressure atmosphere, wherein the electron source is a cold micropoint cathode.

REFERENCES:
patent: 4857161 (1989-08-01), Borel et al.
patent: 4940916 (1990-07-01), Borel et al.
patent: 5103145 (1992-04-01), Doran
Discovery, "Measuring vacuum by counting molecules", 1964 pp. 15-16.
Physica Scripta., "Extreme Vacua: Achievements and Expectations", 1988, vol. T22, pp. 48-54.

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