Ionization vacuum gauge

Details Ionization vacuum gauge Ionization vacuum gauge

2006-05-08

2010-06-22

Nguyen, Vincent Q (Department: 2831)

Electricity: measuring and testing

Using ionization effects

For monitoring pressure

C324S464000

Reexamination Certificate

active

07741852

ABSTRACT:
An ionization vacuum gauge which has at least three electrodes of a grid (2), an electron source (3) and an ion collector (1) in a vacuum vessel (4) connected in communication with a vacuum apparatus, oscillates electrons emitted front the electron source (3) within and outside of the grid (2), ionizes gas molecules flying into the grid (2) by the oscillated electrons, supplements the ionized ions by the ion collector (1) to convert into a current signal, and measures a gas molecular density (pressure) in the vacuum apparatus according to the obtained current intensity, wherein the ion collector (1) is provided with a heating device for heating the ion collector.

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patent: 2000-039375 (2000-02-01), None
patent: 2000-329634 (2000-11-01), None

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