Ionization vacuum gauge

Details Ionization vacuum gauge Ionization vacuum gauge

2006-04-18

2006-04-18

Benson, Walter (Department: 2858)

Electricity: measuring and testing

Using ionization effects

For monitoring pressure

C324S464000

Reexamination Certificate

active

07030620

ABSTRACT:
The present invention relates to an ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container (10), more particularly after operation of a vacuum pump. The gauge comprises an electron-emitting cathode (17), a grid (13) for accelerating the electrons emitted by the cathode and a plate (15) collecting the ions and/or the ionised positive molecules of the gas, wherein said plate is placed outside said grid. Measuring the plate current by a galvanometer allows determining the value of the residual pressure inside the container.

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