Ionization gauge and method of using and calibrating same

Details Ionization gauge and method of using and calibrating same Ionization gauge and method of using and calibrating same

1992-06-30

1994-03-22

Wieder, Kenneth A.

Electricity: measuring and testing

Using ionization effects

For monitoring pressure

324459, 324462, 250374, G01L 2132

Patent

active

052968170

ABSTRACT:
Ionization gauge and method of operating same where the gauge may be of the Bayard-Alpert type and include a shield which completely encloses the electron source, the anode, and the collector electrode so that potentials external to the shield do not disturb the electric charge distribution within the shielded volume to thus stabilize the sensitivity of the gauge. The ionization gauge is further characterized by the following features which may be present either alone or in combination including: (a) the anode is provided with end caps which extend radially inward at least 25% of the radius of the anode but not more than 75% of the radius; (b) the ion collector has a diameter of not less than 0.015 in. and not more than 0.080 in.; (c) the ion collector extends at its free end at least through one of the partial end caps of the anode; (d) the electron source is not substantially longer axially than the region within the anode volume in which the electric field is predominantly directed radially inward and where the electron source is located substantially only adjacent to the foregoing region; (e) the anode is provided with a substantially uniformly transparent grid structure in the regions where the electrons enter the anode volume and where they exit from the anode volume.

REFERENCES:
patent: 3356287 (1967-12-01), Winters
patent: 3495165 (1970-02-01), Cobine et al.
patent: 3742343 (1973-06-01), Pittaway
patent: 3743876 (1973-07-01), Redhead
patent: 3839655 (1974-10-01), Helgeland et al.
patent: 4307323 (1981-12-01), Bills et al.
patent: 4747311 (1988-05-01), Hojoh
patent: 4792763 (1988-12-01), Haas
patent: 4902977 (1990-02-01), Kenny et al.
patent: 5128617 (1992-07-01), Bills
"Long term behaviour of ionization gauges", K. F. Poulter & C. M. Sutton, Vacuum, vol. 31, No. 3, pp. 147-150, 1981.
"Reliability of high vacuum measurements", C. R. Tilford, J. Vac. Sci. Technol., A1 (2), Apr.-Jun. 1983, pp. 152-162.
"Performance characteristics of a broad range ionizat ion gage tube", C. R. Tilford & K. E. McCulloh, J. Vac. Sci. Technol., 20(4), Apr. 1982, pp. 1140-1143.
"Procedure for Calibrating Hot Filament Ionization Gauges Against a Reference Manometer in the Range 10.sup.-2 -10.sup.-5 Torr", Journal of Vacuum Science & Technology Standard AVS Jun. 4, 1969, pp. 370-374.
"Summary Abstract: A thin-collector Bayard-Alpert gauge for 10.sup.-12 Torr Vacuum" H. C. Hseuh & C. Lanni, J. Vac. Sci. Technol., A5(5), Sep./Oct. 1987, pp. 3244-3246.
"Sensitivity variation of Bayard-Alpert gauges with and without closed grids from 10.sup.-4 to 1 Pa", R. N. Peacock & N. T. Peacock, J. Vac. Sci. Technol., A8(4), Jul./Aug. 1990, pp. 3341-3344.
"Collector Dimensions and Sensitivity in BayaRD Alpert Ionization Gauge", by J. Groszkowski, Bulletin De L'Acadamie, vol. XIII, No. 2-1965, Jan., 1965.
"Cathode Dimensions and Sensitivity in Bayard-Alpert Ionization Gauge", by J. Groszkowski, Bulletin de L'Acadamie, vol. XIII, No. 3-1965, Jan. 25, 1965.
"Accurary of vacuum gauges", Wolfgang Jitschin, J. Vac. Sci. Technol. A 8(2), Mar./Apr. 1990, pp. 948-955.
European Organization for Nuclear Research, "Low Pressure Limit of The Bayard-Alpert Gauge", by C. Benvenuti and M. Hauer, Geneva, Aug. 2, 1976.
Patent Abstracts of Japan, vol. 6, No. 234 (E-143) (1112) Nov. 20, 1982 JP-A-57 134 855.

Affiliated with

Also associated with

Rating

Ionization gauge and method of using and calibrating same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ionization gauge and method of using and calibrating same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ionization gauge and method of using and calibrating same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-439506