Ion sputtering pump with getter module

Details Ion sputtering pump with getter module Ion sputtering pump with getter module

1992-03-10

1993-06-22

Smith, Leonard E.

Pumps

Electrical or getter type

Getter heating, vaporizing, or regeneration

H01J 4112

Patent

active

052211908

ABSTRACT:
The invention relates to an ion sputtering pump having a housing with at least one getter module located in the housing. The getter module has a heating device. In order to reduce the amount of time required for the activation and regeneration of the getter module, the heating device is in direct, intimate thermal contact with the getter module.

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