Ion sources

Details Ion sources Ion sources

1980-12-30

1982-10-12

Anderson, Bruce C.

Radiant energy

Ion generation

Field ionization type

3133631, H01J 2700

Patent

active

043541135

ABSTRACT:
An ion source comprises a cylindrical chamber having a longitudinal exit slit formed therein and two parallel anode wires extending the length of the chamber in the central region thereof and symmetrically disposed with respect to the longitudinal axis of the chamber and the exit slit, wherein at each end of the exit slit there is positioned at or near the zero potential equipotential a mask, the separation of the inner ends of the masks defining the width of the ion beam emitted by the source.

REFERENCES:
patent: 3411035 (1968-11-01), Necker et al.
patent: 3784858 (1974-01-01), Franks
patent: 3831052 (1974-08-01), Knechtli
patent: 3944873 (1976-03-01), Franks

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