Ion source with substantially planar design

Details Ion source with substantially planar design Ion source with substantially planar design

2007-02-27

2007-02-27

Le, Hoanganh (Department: 2821)

Radiant energy

Ion generation

Field ionization type

C250S427000

Reexamination Certificate

active

10986456

ABSTRACT:
In certain example embodiments of this invention, there is provide an ion source including an anode and a cathode. In certain example embodiments, the cathode does not overhang over the anode, or vice versa. Since no, or fewer, areas of overhang are provided between the anode and cathode, there is less undesirable build-up on the anode and/or cathode during operation of the ion source so that the source can run more efficiently. Moreover, in certain example embodiments, an insulator such as a ceramic or the like is provided between the anode and cathode.

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