Ion source with pole rings having differing inner diameters

Details Ion source with pole rings having differing inner diameters Ion source with pole rings having differing inner diameters

1997-05-09

1999-03-30

Pascal, Robert

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

250423R, H01J 27102

Patent

active

058893717

ABSTRACT:
The improved ion source of the present invention includes upper and lower spaced apart but coaxially arranged magnetic pole rings having differing inner diameters. Because of the non-symmetry of the pole pieces or rings, the magnetic flux field created therebetween is non-symmetrical from top to bottom. This, and the arrangement and configuration of the anode ring located between the pole pieces, create an increased plasma region and higher plasma density resulting in increased thermal management, improved stoichiometry and increased density of the thin film devices being fabricated.

REFERENCES:
patent: 4652795 (1987-03-01), Lee et al.
patent: 4710283 (1987-12-01), Singh et al.
patent: 4716340 (1987-12-01), Lee et al.
patent: 5413663 (1995-05-01), Shimizu et al.
patent: 5468363 (1995-11-01), Falabella
patent: 5656819 (1997-08-01), Greenly
Denton Vacuum, Inc., "CC-102R-Cold Cathode Ion Source System" Users Manual Feb. 1993.

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