Ion source with improved primary arc collimation

Details Ion source with improved primary arc collimation Ion source with improved primary arc collimation

1983-12-16

1985-07-23

Dixon, Harold

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

250426, 3133621, 31511131, 31511141, H01J 724

Patent

active

045310777

ABSTRACT:
An improved negative ion source is provided in which a self-biasing, molybdenum collimator is used to define the primary electron stream arc discharge from a filament operated at a negative potential. The collimator is located between the anode and the filament. It is electrically connected to the anode by means of an appropriate size resistor such that the collimator is biased at essentially the filament voltage during operation. Initially, the full arc voltage appears across the filament to collimator until the arc discharge strikes. Then the collimator biases itself to essentially filament potential due to current flow through the resistor thus defining the primary electron stream without intercepting any appreciable arc power. The collimator aperture is slightly smaller than the anode aperture to shield the anode from the arc power, thereby preventing the exposure of the anode to the full arc power which, in the past, has caused overheating and erosion of the anode collimator during extended time pulsed-beam operation of the source. With the self-biasing collimator of this invention, the ion source may be operated from short pulse periods to steady-state without destroying the anode.

REFERENCES:
patent: 2700107 (1955-01-01), Luce
patent: 2903586 (1959-09-01), Pressey
patent: 3326769 (1967-06-01), Neidigh et al.
patent: 3678334 (1972-07-01), Dugdale et al.
patent: 4447761 (1984-05-01), Stinnett
"Hot Electron Plasma Blanket" by V. J. Meece et al., ORNL 3908, UC-20 Report Oct. 31, 1965, pp. 62, 63.
Plasma Studies on a DuoPIGatron Ion Source by Tsai et al., pp. 649-655 Rev. Sci. Inst., vol. 48, No. 6, Jun. 1977.

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