Ion source using a hollow cathode discharge arrangement and in p

Details Ion source using a hollow cathode discharge arrangement and in p Ion source using a hollow cathode discharge arrangement and in p

1976-05-13

1978-05-02

Segal, Robert

Electric lamp and discharge devices

Discharge device with positive ion emitter

313209, H01J 2700

Patent

active

040877213

ABSTRACT:
The ion source according to the invention comprises a hollow cathode discharge arrangement 10 in which a plasma is produced by the ionization of a gas under the effect of a positive d.c. voltage applied to an anode 3 in relation to two cathodes 1 and 20. One of these cathodes 20 is formed with holes 30 through which some of the ions of the plasma escape. A filament 7 emits slow electrons towards this cathode, neutralizing the space charge created ahead of this cathode by the ions having left the arrangement and enables them to be propagated towards a point of use 40 situated at a considerable distance. A grid 8 limits the number of these electrons entering the arrangement 10. The source provides ion beams of clearly defined energy and high density.

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