Ion source method and apparatus

Details Ion source method and apparatus Ion source method and apparatus

1990-12-03

1991-07-23

Berman, Jack I.

Radiant energy

Ion generation

Field ionization type

250423F, 250424, 313230, 3133591, 3133611, 3133631, H01J 2700

Patent

active

050346121

ABSTRACT:
Ion source methods and apparatus include an ion generating element for providing a reservoir of flowing liquid source material, accelerating elements for providing an electric field around the ion generating element, and shielding elements. The shielding element is constructed from a material including atoms which, if backsputtered onto the ion generating element, do not substantially degrade ion source performance.

REFERENCES:
patent: 4328667 (1982-05-01), Valentian et al.
patent: 4367429 (1983-01-01), Wang et al.
patent: 4549082 (1985-10-01), McMillan
patent: 4567398 (1986-01-01), Ishitani et al.
patent: 4687940 (1987-08-01), Ward et al.
patent: 4752692 (1988-06-01), Jergenson et al.
patent: 4774414 (1988-09-01), Umemura
patent: 4846953 (1989-07-01), Yoshida

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