Ion source including magnet and magnet yoke assembly

Details Ion source including magnet and magnet yoke assembly Ion source including magnet and magnet yoke assembly

2006-08-24

2009-02-10

Nguyen, Kiet T (Department: 2881)

Radiant energy

Ion generation

Field ionization type

Reexamination Certificate

active

07488951

ABSTRACT:
An ion source is provided which is capable of generating and/or emitting an ion beam which may be used to deposit a layer on a substrate or to perform other functions. In certain example embodiments, a magnet yoke assembly used in the ion source is provided, and the magnet yoke assembly includes a lower yoke and an upper yoke. At least one magnet is disposed between the lower yoke and the upper yoke, with the at least one magnet having a substantially rectangular shape in certain example embodiments. The at least one magnet may be adhered to the lower yoke and/or the upper yoke.

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