Radiant energy – Radiation controlling means
Patent
1998-02-26
2000-05-09
Anderson, Bruce C.
Radiant energy
Radiation controlling means
250423R, H01J 2700
Patent
active
060607181
ABSTRACT:
An attenuator (90) for an ion source (26) is provided. The ion source comprises a plasma chamber (76) in which a gas is ionized by an exciter (78) to create a plasma which is extractable through at least one aperture (64) in an apertured portion (50) of the chamber to form an ion beam. The attenuator (90) comprises a member (90) positioned within the chamber (76) intermediate the exciter (78) and the at least one aperture (64), the member providing at least one first opening (97) corresponding the at least one aperture (64), and being moveable between first and second positions with respect to the at least one aperture. In one embodiment, in the first position, the member is positioned adjacent the aperture (64) to obstruct at least a portion of the aperture, and in the second position the member is positioned away from the aperture (64) so as not to obstruct the aperture. In a second embodiment, the aperture (64) resides in an aperture plate (50) and (i) the member and the aperture plate form a generally closed region (102) between the aperture plate and the chamber (76) when the member is in the first position, and (ii) the aperture (64) is in direct communication with the chamber (76) when the member is in the second position. In this second embodiment, plasma within the chamber (76) diffuses through the region (102) before being extracted through the aperture in the first position, and plasma within the chamber is extracted directly through the aperture in the second position.
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K. W. Ehlers and K. N. Leung (Effect of a magnetic filter on hydrogen ion species in a multicusp ion source) Jun. 17, 1981.
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Brailove Adam A.
Sato Masateru
Anderson Bruce C.
Eaton Corporation
Kastelic John A.
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