Electric lamp and discharge devices – With positive or negative ion acceleration – Supplying ionizable material
Patent
1989-10-17
1992-04-21
O'Shea, Sandra L.
Electric lamp and discharge devices
With positive or negative ion acceleration
Supplying ionizable material
31323131, 31511121, H05A 1300, H01J 724
Patent
active
051071703
ABSTRACT:
An ion source having an auxiliary plasma chamber and a main plasma chamber. The auxiliary plasma chamber receives an ionizable gas and is provided with microwaves with sufficient power to create a high frequency discharge and generate a subplasma for sustaining the creation of an ion plasma in the main chamber. Multiple auxiliary plasma chambers may be used and each may be separately regulated. Protective plates, screens, and coatings may be provided to protect the ion plasma of the main chamber from sputtering a facing wall of the auxiliary plasma chamber.
REFERENCES:
patent: 4757237 (1988-07-01), Hellblom et al.
patent: 4810935 (1989-03-01), Boswell
patent: 4859909 (1989-08-01), Gualandris et al.
Ishikawa Junzo
Matsubara Yoshio
Nogawa Shuichi
Sasai Toshiaki
Takara Hideaki
Nissin Electric Co. Ltd.
O'Shea Sandra L.
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