Ion source generator auxiliary device for phosphorus and arsenic

Details Ion source generator auxiliary device for phosphorus and arsenic Ion source generator auxiliary device for phosphorus and arsenic

1997-08-01

1998-12-22

Wong, Don

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

31511191, 31511121, 250423R, 20419234, H01J 724

Patent

active

058523456

ABSTRACT:
The present invention comprises an ion source apparatus for producing an ion beam from a solid material of arsenic or phosphorus. The ion source includes a plasma chamber having an inlet orifice and an outlet orifice wherein a non-toxic carrier gas is inputted into the plasma chamber. A means for generating a gas plasma is arranged within the plasma chamber and an electrically insulated platform is also arranged within the plasma chamber. A heatable wafer of solid source material of a metal phosphide or arsenide is attached to the platform, for conversion upon heating, into an ion beam.

REFERENCES:
patent: 3689766 (1972-09-01), Freeman
patent: 3774026 (1973-11-01), Chavet
patent: 5089746 (1992-02-01), Rosenblum et al.
patent: 5309064 (1994-05-01), Armini

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