Ion source generator auxiliary device

Details Ion source generator auxiliary device Ion source generator auxiliary device

1993-03-22

1994-05-03

Kwon, John T.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

31511181, 250423R, H01J 724

Patent

active

053090640

ABSTRACT:
An ion source generating device having a main arc chamber and an auxiliary chamber attached to and in communication with the main chamber. The auxiliary chamber contains metal chips of barium, calcium or cerium to provide a reduction reaction of feed gas passing through the chamber and into the main chamber, in which ion beams are generated.

REFERENCES:
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patent: 3774026 (1973-11-01), Chavet
patent: 4446403 (1984-05-01), Cuomo et al.
patent: 4739170 (1988-04-01), Varga
patent: 4782235 (1988-11-01), Lejeune et al.
patent: 4845364 (1989-07-01), Alexander et al.
patent: 4870284 (1989-09-01), Hashimoto et al.
patent: 4952843 (1990-08-01), Brown et al.
patent: 4977352 (1990-12-01), Williamson
patent: 5107170 (1992-04-01), Ishikawa
"Ion Implantation Techniques" by H. Ryssel and H. Glawischnig; Chapter 2 Ion Sources; Springer-Verlag 1982.

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