Ion source and method of drawing out ion beam

Details Ion source and method of drawing out ion beam Ion source and method of drawing out ion beam

1988-11-16

1989-09-26

Howell, Janice A.

Radiant energy

Ion generation

Field ionization type

250423F, 250424, 250426, 250427, 2504923, 3133601, 31511181, A01J 724

Patent

active

048702846

ABSTRACT:
An ion source including a plasma chamber for generating a plasma therein, at least three parallel electrodes for drawing out an ion beam from the plasma chamber, the first and second power sources for generating high and low drawing voltages, respectively, is disclosed in which the first power source is connected between the first pair of adjacent electrodes spaced apart from each other a relatively long distance to perform a high voltage operation, the second power source is connected between a second pair of adjacent electrodes spaced apart from each other a relatively short distance to perform a low voltage operation, and one of the high voltage operation and low voltage operation is changed over to the other with the aid of switching elements.

REFERENCES:
patent: 4713585 (1987-12-01), Ohno et al.
patent: 4739169 (1988-04-01), Kurosawa et al.
patent: 4742232 (1988-05-01), Biddle et al.
patent: 4767931 (1988-08-01), Sato et al.

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