Ion source and ion beam device

Details Ion source and ion beam device Ion source and ion beam device

2005-11-22

2005-11-22

Wells, Nikita (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S492300, C250S492200

Reexamination Certificate

active

06967334

ABSTRACT:
An ion source includes a plasma producing device, an ion extraction electrode having a first grid with a positive potential and a second grid with negative potential for extracting ions from a plasma excitation area of the plasma source device, and a communicating portion communicating the plasma excitation area with an outside thereof for removing an influence of the negative potential of the second grid with respect to electrons from the plasma excitation area.

REFERENCES:
patent: 4926056 (1990-05-01), Spindt
patent: 6238582 (2001-05-01), Williams et al.

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