Ion source

Details Ion source Ion source

1986-09-08

1988-12-27

Boudreau, Leo H.

Electric lamp and discharge devices

With positive or negative ion acceleration

Extraction or target electrode

313230, 3133591, 313349, 250396R, 2504923, 31511131, 31511181, H01J 3934

Patent

active

047942983

ABSTRACT:
An ion beam source adapted to provide a plurality of parallel planar ion beams the centers of which are superimposed and the planes of which are inclined at an angle to the line joining their centers such that a geometric projection of the ion beams in a direction orthogonal to that joining the centers of the ion beams is continuous.

REFERENCES:
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patent: 2946915 (1960-07-01), Haase
patent: 3908123 (1975-09-01), Veach et al.
patent: 4104875 (1978-08-01), Birner et al.
patent: 4358686 (1982-11-01), Kinoshita
patent: 4447773 (1984-05-01), Aston
patent: 4481062 (1984-11-01), Kaufman et al.
patent: 4574179 (1986-03-01), Masuzawa et al.
patent: 4578589 (1986-03-01), Aitken
patent: 4611121 (1986-09-01), Miyamura et al.

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