Ion source

Details Ion source Ion source

2007-07-20

2009-08-04

Wells, Nikita (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S425000, C315S111810, C315S111410, C315S111310, C313S230000, C313S231410

Reexamination Certificate

active

07569837

ABSTRACT:
It is a technical challenge to provide a small-sized ion source excellent in operability.An ion source of the present invention includes: a cylindrical insulation tube (2) opened upward and opened at part of its lower surface; a plurality of hollow cylindrical permanent magnets (3), provided on the outer peripheral surface of the insulation tube to be arranged in a row in the axial direction of the insulation tube; a gas supplying means (34, 35, 20) for supplying gas into the insulation tube; a cathode electrode, at the tip end of which a fitting unit (19) for fitting of a solid material (18) there to is formed; an annular anode electrode (5), which is fitted to an opening in the lower surface of the insulation tube; an upper frame (6), which blocks the upper portion of the insulation tube and suspends the cathode electrode so as to allow the fitting unit to approach the anode electrode; and a lower frame (7), in which an extraction port (37) is formed for extracting ions emitted from the anode electrode, and on which the insulation tube is mounted.

REFERENCES:
patent: 4714860 (1987-12-01), Brown et al.
patent: 4785220 (1988-11-01), Brown et al.

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