Ion source

Details Ion source Ion source

2006-05-19

2008-10-14

Wells, Nikita (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S424000, C250S427000, C250S492210, C315S111810, C315S111910

Reexamination Certificate

active

07435971

ABSTRACT:
An exemplary ion source for creating a stream of ions has an aluminum alloy arc chamber body that at least partially bounds an ionization region of the arc chamber. The arc chamber body is used with a hot filament arc chamber housing that either directly or indirectly heats a cathode to sufficient temperature to cause electrons to stream through the ionization region of the arc chamber. A temperature sensor monitors temperatures within the arc chamber and provides a signal related to sensed temperature. A controller monitors sensed temperature as measured by the sensor and adjusts the temperature to maintain the sensed temperature within a range.

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patent: WO 01/43157 (2001-06-01), None
“Water Cooled Plasma Flood Source for Intense Ion Beam Implantation” to Zhimin Wan et al IEEE, 2002.

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