Ion source

Details Ion source Ion source

2008-04-29

2008-04-29

Wells, Nikita (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S427000, C250S426000, C315S111810, C313S34600R

Reexamination Certificate

active

07365339

ABSTRACT:
A cathode holder of a tubular shape is inserted into an opening for a cathode of a plasma generating chamber with a tip of the cathode holder positioned outward from an inner wall surface of the plasma generating chamber. The cathode is held in the cathode holder so that a front surface of the cathode will be positioned outward from the inner wall surface. In the cathode holder is provided a tubular first heat shield surrounding the cathode with a space provided between the first heat shield and the cathode, the tip of the first heat shield positioned outward from the inner wall surface. At a rear side of the cathode is provided a filament. The gap between the cathode holder and the plasma generating chamber is filled with an electrical insulating material.

REFERENCES:
patent: 5497006 (1996-03-01), Sferlazzo et al.
patent: 5703372 (1997-12-01), Horsky et al.
patent: 6583544 (2003-06-01), Horsky et al.
patent: 6878946 (2005-04-01), Farley et al.
patent: 2004/0061068 (2004-04-01), Farley et al.
patent: A-07-262946 (1995-10-01), None
patent: A-10-134728 (1998-05-01), None
patent: 2995388 (1999-10-01), None
patent: WO 2001/88947 (2001-11-01), None
patent: WO 2002/078033 (2002-10-01), None

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