Ion protected linear electron beam metal evaporator

Details Ion protected linear electron beam metal evaporator Ion protected linear electron beam metal evaporator

1975-11-10

1977-11-15

Envall, Jr., R. N.

H01J 37305

Patent

active

040586677

ABSTRACT:
A linear electron beam evaporation source for a high vapor temperature material such as uranium which is protected against filament degradation from reverse accelerated ions in the generated vapor. Electron beam evaporation is produced by the energy in a focused, cylindrical electron beam emanating from an elongate filament and impinging upon a trough shaped crucible of the material to be evaporated. A set of linear electrodes are provided adjacent to the trajectory of the focused electron beam from the filament to provide a slight deceleration voltage in the electron accelerating potential between the filament and the crucible. The decelerating voltage acts as a potential barrier to the few ions in the generated vapor.

REFERENCES:
patent: 2947867 (1960-08-01), Brackney
patent: 3307936 (1967-03-01), Smith, Jr.
patent: 3437734 (1969-04-01), Roman et al.
patent: 3655903 (1972-04-01), Roman et al.

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