Electric lamp and discharge devices – Fluent material supply or flow directing means – Plasma
Patent
1975-04-25
1976-11-30
Demeo, Palmer C.
Electric lamp and discharge devices
Fluent material supply or flow directing means
Plasma
219121P, H01J 1704, H05H 100
Patent
active
039951863
ABSTRACT:
An ion gun includes an elongated electrode with a hollow end portion closed by a perforated end plate. The end plate is positioned parallel to a perforated flat electrode of opposite electrical polarity. An insulated sleeve encompasses the elongated electrode and extends outwardly from the perforated end towards the flat electrode. The sleeve length is separated into two portions of different materials. The first is formed of a high-temperature material that extends over the hollow portion of the elongated electrode where the arc is initiated by a point source electrode. The second sleeve portion extending over the remainder of the elongated electrode is of a resilient material for enhanced seal-forming ability and retention of plasma gas. Perforations are arranged in the flat electrode in a mutually opposing triangular pattern to project a plasma beam having a generally flat current profile towards a target requiring precision milling.
REFERENCES:
patent: 3097292 (1963-07-01), Kugler et al.
patent: 3347698 (1967-10-01), Ingham, Jr.
patent: 3579028 (1971-05-01), Cheng
Campana, Jr. Thomas J.
Kaminsky Manfred S.
Carlson Dean E.
Churm Arthur A.
DeMeo Palmer C.
Glenn Hugh W.
The United States of America as represented by the United States
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