Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2005-03-08
2005-03-08
Berman, Jack (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S3960ML, C445S047000, C445S049000, C313S360100
Reexamination Certificate
active
06864485
ABSTRACT:
In accordance with one specific embodiment of the present invention, the ion optics for use with an ion source have a plurality of electrically conductive grids that are mutually spaced apart and have mutually aligned respective pluralities of apertures through which ions may be accelerated and wherein each grid has an integral peripheral portion. A plurality of moment means are applied to a circumferentially distributed plurality of locations on the peripheral portion of each grid, which is initially flat, thereby establishing an annular segment of a cone as the approximate shape for that peripheral portion and a segment of a sphere as the approximate dished shape for the grid as a whole. The plurality of grids have conformal shapes in that the direction of deformation and the approximate spherical radii are the same. This elastic deformation during installation avoids any need for any permanent or inelastic deformation during fabrication, as well as controlling the excessive thermal displacements and accompanying performance changes to which flat grids are prone.
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patent: 4873467 (1989-10-01), Kaufman et al.
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Kahn James R.
Kaufman Harold R.
Parker Rhonda J.
Berman Jack
Edmundson Dean P.
Fernandez Kalimah
Kaufman & Robinson, Inc.
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