Ion optics systems

Details Ion optics systems Ion optics systems

2005-01-24

2008-10-21

Vanore, David A. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S3960ML, C250S305000

Reexamination Certificate

active

07439520

ABSTRACT:
In various embodiments, provided are ion optics systems comprising two or more pairs of ion condensers arranged where the first member and second member of each pair are disposed on opposite sides of a first plane such that the first member of the pair has a position that is substantially mirror-symmetric about the first plane relative to the position of the second member of the pair and wherein the deflection angle of each of the ion condensers is less than or equal to about π radians.

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