Ion neutralizer

Details Ion neutralizer Ion neutralizer

2007-10-16

2007-10-16

Berman, Jack I. (Department: 2881)

Radiant energy

Electrically neutral molecular or atomic beam devices and...

C250S489000, C250S492210, C250S398000, C250S492200, C313S359100, C313S359100

Reexamination Certificate

active

11174571

ABSTRACT:
An ion neutralizer enhances a heat transfer rate between a reflecting plate and a frame while preventing the reflecting plate from being bent due to thermal deformation. The ion neutralizer includes a frame and a plurality of reflecting plates integrally formed with the frame to neutralize plasma ions. Each reflecting plate has a cantilever shape. Each reflecting plate has a supporting end in surface contact with the frame, and a free end to define a space with the frame in order to prevent the reflecting plate from being bent upon stretching due to thermal deformation.

REFERENCES:
patent: 4662977 (1987-05-01), Motley et al.
patent: 6515408 (2003-02-01), England et al.
patent: 2004/0016876 (2004-01-01), Yeom et al.
patent: 2006/0163466 (2006-07-01), Park et al.
patent: 2006/0219887 (2006-10-01), Hwang et al.
patent: 2001-102628 (2001-11-01), None
patent: 2004-33524 (2004-04-01), None

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