Ion neutralizer

Details Ion neutralizer Ion neutralizer

1992-04-22

1993-09-07

Berman, Jack I.

Radiant energy

Electrically neutral molecular or atomic beam devices and...

H05H 300

Patent

active

052431894

ABSTRACT:
An ion neutralizer which neutralizes electric charges on ions and produces a fast atom beam in an ultra-high vacuum comprising: an ion source disposed in a vacuum container; a hollow container disposed in the vacuum container, the hollow container being closed at both ends thereof except for an ion beam entrance hole provided in one end portion thereof and a fast atom beam exit hole provided in the other end portion thereof; a metal vapor generating source comprising a filament wound with a fine wire or ribbon of a metal selected from titanium, magnesium and aluminum, the filament being disposed in the hollow container in such a manner as to surround an axis connecting the ion beam entrance hole and the fast atom beam exit hole; a vacuum pump connected to the vacuum container; and a filament heating power supply disposed outside the vacuum container and the hollow container and connected to the filament.

REFERENCES:
patent: 3657542 (1972-04-01), Futch, Jr. et al.
patent: 3790787 (1974-02-01), Geller
patent: 4783595 (1988-11-01), Seidl
patent: 4886971 (1989-12-01), Matsumura et al.
patent: 5055672 (1991-10-01), Nagai
Toshiba, Derwent Abstract No. 87-098509 (1987).
Nippon Telegraph, Patent Abstracts of Japan, vol. 13, No. 513 (E-847) (1989).
Nagai, Surface Science, vol. 10, No. 1, pp. 29-39 (1989).
Nagai et al., FAB-SIMS Study for Analysis of Insulators, pp. 448-450.
Nagai, Review of the Electrical Communications Laboratories, vol. 36, No. 6, pp. 587-592 (1988).
Shimokawa et al., Nuclear-Instruments and Methods in Physics Research B33, pp. 867-870 (1988).

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