Ion induced thin surface coating

Details Ion induced thin surface coating Ion induced thin surface coating

1982-07-08

1984-10-02

Lawrence, Evan K.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

B05D 306

Patent

active

044748272

ABSTRACT:
Thin film coatings comprising hydrocarbon polymers are deposited on and merged into a substrate by causing secondary ionically activated and electric field energized atomic or molecular ionic species including hydrocarbon species to be directed to a substrate in conjunction with an ion beam of primary energetic ions.

REFERENCES:
patent: 3329601 (1967-07-01), Mattox
patent: 4112137 (1978-09-01), Zega
patent: 4170662 (1979-10-01), Weiss et al.
patent: 4227961 (1980-10-01), Takagi
patent: 4264642 (1981-04-01), Ferralli
Heavens, O. S., Thin Film Physics, London, Methuen & Co. Ltd., 1970, pp. 2-3.
Holland, L., Vacuum Deposition of Thin Films, London, Chapman and Hall Ltd., 1966, pp. 2-3, 211, 510-511.
Chopra, K. L., Thin Film Phenomena, New York, McGraw-Hill Book Company, 1969, pp. 50-51, 189.
Boenig, H. V., Plasma Science and Technology, Ithaca, N.Y., Cornell University Press, 1982, pp. 122, 173, 180, 181, 251, 282, 283.

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