Ion implanter

Details Ion implanter Ion implanter

1990-10-04

1991-12-10

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

2504923, 250398, H01J 3700

Patent

active

050721259

ABSTRACT:
An ion implanter has a sample table on which a sample is placed, and means for injecting ions into the sample by applying an ion beam to the sample on the sample table. The ion implanter has magnetic field applying means for generating radial magnetic fields on the surface of the sample from near the center of the sample to outside of the outer periphery of the sample. The secondary electrons generated when the ion beam irradiates the sample table or the sample, including the secondary electrons generated from the sample table near the outer periphery of the sample, are trapped in the magnetic fields and transferred to the central portion of the sample. The secondary electrons are attracted by the electrostatic charge of the ions injected to the surface of the sample and recombine with the ions. Consequently, the electrostatic charge on the surface of the sample is decreased, preventing generation of device defects caused by electrostatic discharge damage.

REFERENCES:
patent: 4011449 (1977-03-01), Ko et al.
patent: 4135097 (1979-01-01), Fomeris et al.
patent: 4775796 (1988-10-01), Purser et al.
McKenna et al., "Wafer Charging . . . Current Implanter", Nuclear Instruments . . . , B37/38 (1989) pp. 492-496.

Affiliated with

Also associated with

Rating

Ion implanter does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ion implanter, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ion implanter will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1042870