Ion implantation simulation apparatus, method, and program

Details Ion implantation simulation apparatus, method, and program Ion implantation simulation apparatus, method, and program

2005-01-10

2008-09-09

Frejd, Russell (Department: 2128)

Data processing: structural design, modeling, simulation, and em

Modeling by mathematical expression

C703S013000, C700S123000

Reexamination Certificate

active

07424411

ABSTRACT:
The group creation part divides n ion particles into groups of a group G1, a group G2, . . . , and a group Gk. The individual area setting part sets an initial condition calculation area1a, as an individual area of the group G1, and makes the calculation part calculate movement of the ion particle. Then, one by one, the individual area setting part sets an individual area of a group Gi+1, based on a range Rp, a dispersion σL, etc. indicating a calculation result of an ion particle belonging to the group Gi. Further, the individual area setting part implants an ion particle belonging to the group Gi+1into the individual area of the group Gi+1and makes the calculation part calculate movement of the implanted ion particle.

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