Ion implantation of spherical surfaces

Details Ion implantation of spherical surfaces Ion implantation of spherical surfaces

1990-07-25

1992-01-07

Pianalto, Bernard

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 47, 427328, 427347, B05D 306

Patent

active

050790323

ABSTRACT:
An improved method and an apparatus for the ion implantation of spherical surfaces are disclosed. The method includes the provision of a revised fixture by which a plurality of spherical workpieces are presented to a large area ion beam in a way that their entire respective spherical surfaces are uniformly ion implanted to improve their surface characteristics. The fixture includes a disc mounted for motion about two axes normal to each other, a plurality of holes formed in a the disc loosely to accommodate therein a plurality of spherical workpieces, each of the plurality of holes formed with a spherical bottom and having a cleaning orifice, cooling means disposed on one side of the disc, a thermocouple operatively mounted in association with the disc, and a cover plate mounted on a second side of the disc and provided with a plurality of apertures concentric with the plurality of holes formed in the disc. The method includes randomization of the motion about one of the two axes of motion by interrupting this motion for about 15 to about 30 seconds once every 90 to about 120 seconds.

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