Ion implantation machine with photonic pressure particle filter

Details Ion implantation machine with photonic pressure particle filter Ion implantation machine with photonic pressure particle filter

1993-08-20

1995-05-30

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

H01J 37317

Patent

active

054204356

ABSTRACT:
A beam of radiant energy 50, 64 intersects a beam of ions 26 proximate the target 30 of the ions to force entrained contaminants out of the ion beam. The radiant beam of photons 50, 64 thus act as a filter for contaminants in the beam of ions.

REFERENCES:
patent: 4700077 (1987-10-01), Dykstra et al.
patent: 5170890 (1992-12-01), Wilson

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