Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
Reexamination Certificate
2008-04-07
2010-02-09
Bui, Bryan (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Quality evaluation
C356S237100
Reexamination Certificate
active
07660686
ABSTRACT:
Samples subject to ion implantation are measured using a modulated optical reflectance system and the results of the measurements are compared to specification ranges for acceptable samples and a plurality of parametric ranges. Each parametric range is associated with a different known type of implantation fault. Measurement results outside of the specification range may be characterized by fault type by comparing the measurement results to a plurality of parametric ranges. In this way, a fault type may be quickly identified and the corresponding source of the fault may be corrected.
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Nicolaides Lena
Salnik Alexei
Tsai Bin-ming Benjamin
Bui Bryan
Isenberg Joshua D.
JDI Patent
KLA-Tencor Corporation
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