Ion implant device with modulated scan output

Details Ion implant device with modulated scan output Ion implant device with modulated scan output

1994-03-14

1995-05-23

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

2504923, 250398, H01J 37302

Patent

active

054183782

ABSTRACT:
An ion implanter is provided having a modulator which provides a variable frequency modulated scan signal. The modulator ensures that the scan signal will not retrace substantially upon itself during a scan cycle, and during subsequent scan cycles. Minimization of retrace allows for a more uniform dopant placed across the upper surface of the wafer and thereby eliminates or minimizes underdoping areas often arising between retraced beam widths when heavy atomic species are implanted.

REFERENCES:
patent: 3688203 (1972-08-01), Harrison
patent: 4449051 (1984-05-01), Berkowitz
patent: 4736107 (1988-04-01), Myron
patent: 4746803 (1988-05-01), Inoue et al.
patent: 4761559 (1988-08-01), Myron
patent: 4851693 (1989-07-01), Fisher
patent: 5012111 (1991-04-01), Ueda

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