Ion generating device and method of manufacturing same

Details Ion generating device and method of manufacturing same Ion generating device and method of manufacturing same

1986-12-11

1987-09-01

Goldberg, E. A.

Recorders

Electric recording

Electrochemical

3461531, 346155, 156634, 250426, G01D 1506, H01J 724, C23F 102

Patent

active

046912134

ABSTRACT:
An ion generating device includes a plurality of first electrodes extending in a first direction; a plurality of second electrodes extending in the second direction which is different from the first direction, to constitute a matrix; a third electrode so disposed that the second electrodes lie between the first electrodes and the third electrode, the third electrode having apertures corresponding to the matrix; a first dielectric member disposed between the first electrodes and the second electrodes; a second dielectric member disposed between the second electrodes and third electrode, the second dielectric member having a plurality of apertures corresponding to the matrix, which apertures each have a cross-sectional area generally increasing toward the third electrode. A method of manufacturing the same including the steps of providing an assembly constituted by the first electrodes, the second electrodes and the first dielectric member interposed therebetween; bonding a dielectric sheet to the second electrodes and bonding a conductive sheet to the dielectric sheet; forming apertures corresponding to the matrix in the conductive sheet to form the third electrode; and etching the dielectric sheet with the conductive sheet having the apertures functioning as a resist to form apertures in the dielectric sheet to provide the second dielectric member.

REFERENCES:
patent: 4160257 (1979-07-01), Carrish
patent: 4365549 (1982-12-01), Fotland et al.
patent: 4408214 (1983-10-01), Fotland et al.
patent: 4409604 (1983-10-01), Fotland
patent: 4415403 (1983-11-01), Bakewell
patent: 4558334 (1985-12-01), Fotland

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