Ion bombardment barrier layer for a vacuum tube

Details Ion bombardment barrier layer for a vacuum tube Ion bombardment barrier layer for a vacuum tube

1988-08-23

1990-06-05

Morgenstern, Norman

Electric lamp and discharge devices

Photosensitive

Having phosphor screen

313530, 313534, 250213VT, 427 39, 4272552, B05D 306, H01J 3150, H01J 4018, C23C 1600

Patent

active

049316931

ABSTRACT:
An ionic bombardment barrier layer is provided for vacuum tube, said layer being formed of a stable compound of nitrogen and silicon. It is deposited by vapor phase chemical reaction activated by low temperature plasma. It finds an application in light image intensifier tubes.

REFERENCES:
patent: 2303563 (1942-12-01), Law
patent: 3485666 (1969-12-01), Sterling et al.
patent: 3742224 (1973-06-01), Einstein
patent: 4242371 (1980-12-01), Galves
patent: 4395438 (1983-07-01), Chiang
patent: 4618541 (1986-10-01), Forouhi et al.
Vossen et al., ed., Thin Film Processes, Academic Press, N.Y., 1978, pp. 342-351.

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