Ion bombardment apparatus

Details Ion bombardment apparatus Ion bombardment apparatus

1975-05-13

1976-11-02

Segal, Robert

Electric lamp and discharge devices

Fluent material supply or flow directing means

Plasma

313360, 313153, 313162, H01J 1726

Patent

active

039899756

ABSTRACT:
An apparatus with an increased efficiency, for ion bombardment machining operations at voltages not exceeding some few thousands of volts, is provided. It comprises an ion source whose plasma is extracted across grids forming cylinders of revolution about one and the same axis, for example a vertical axis. The specimens for machining are arranged in a ring around the ion source. The ion beam, of radial type, is highly uniform within a cylindrical space defined between two parallel planes, for example horizontal planes. It is possible to limit the apertural angle of the beam by the use of a mask arranged against one of the grids.

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