Ion beam system and machining method

Details Ion beam system and machining method Ion beam system and machining method

2011-05-31

2011-05-31

Souw, Bernard E (Department: 2881)

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

C250S310000, C250S311000, C250S492210, C250S440110, C250S398000

Reexamination Certificate

active

07952083

ABSTRACT:
An ion beam system includes a sample stage which holds a sample, an ion source which generates an ion beam so that the ion beam is extracted from the ion source along an extraction axis, an irradiation optical system having an irradiation axis along which the ion beam is irradiated toward the sample held on the sample stage, and a charged particle beam observation system for observing a surface of the sample which is machined by the irradiated ion beam. The extraction axis along which the ion beam is extracted from the ion source and the irradiation axis along which the sample is irradiated are inclined with respect to one another.

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