Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate
2011-05-31
2011-05-31
Souw, Bernard E (Department: 2881)
Radiant energy
Irradiation of objects or material
Ion or electron beam irradiation
C250S310000, C250S311000, C250S492210, C250S440110, C250S398000
Reexamination Certificate
active
07952083
ABSTRACT:
An ion beam system includes a sample stage which holds a sample, an ion source which generates an ion beam so that the ion beam is extracted from the ion source along an extraction axis, an irradiation optical system having an irradiation axis along which the ion beam is irradiated toward the sample held on the sample stage, and a charged particle beam observation system for observing a surface of the sample which is machined by the irradiated ion beam. The extraction axis along which the ion beam is extracted from the ion source and the irradiation axis along which the sample is irradiated are inclined with respect to one another.
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Fukuda Muneyuki
Hasegawa Masaki
Nakayama Yoshinori
Shichi Hiroyasu
Tomimatsu Satoshi
Antonelli, Terry Stout & Kraus, LLP.
Hitachi High-Technologies Corporation
Logie Michael J
Souw Bernard E
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