Ion-beam source

Details Ion-beam source Ion-beam source

2011-01-04

2011-01-04

Berman, Jack I (Department: 2881)

Radiant energy

Ion generation

Methods

C250S42300F, C250S42300F

Reexamination Certificate

active

07863582

ABSTRACT:
An ion-beam source comprising: a plasma-generation unit for generating plasma and an ion-extraction unit for extraction and acceleration of ions from the aforementioned plasma, where the ion-extraction unit is made in the form of at least one grid under a negative potential. The plasma generating unit consists of a working chamber having a deeply immersed antenna cell. The cell contains a ferromagnetic core, a heat conductor with a heat sink, at least one inductive coil wound onto the ferromagnetic core, and a cap made from a dielectric material that sealingly covers the ferromagnetic core and the inductive coil.

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An article contained in http://casetechnology.com/implanter/source.html (see attached hard copy) describes a known ICP (inductance plasma) source that has arrays of permanent magnets used to produce a multi-cusp magnetic field in regions remote from plasma grids and an RF antenna that is formed by a wire coil, Jun. 6, 2009.

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