Ion beam processing apparatus and gas gun therefor

Details Ion beam processing apparatus and gas gun therefor Ion beam processing apparatus and gas gun therefor

1991-03-28

1992-09-15

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

2504923, 2504921, 239584, 118723, C23C 1604, G21G 500

Patent

active

051480247

ABSTRACT:
A gun of an ion beam processing apparatus has two coaxial cylinders each of which is combined with a piston so as to drive a nozzle back and forth and drive a valve for controlling valve open and closed states to apply a gas. Drift of an image and damage to a sample caused by moving the nozzle are prevented, and miniaturization of the driving system is realized.

REFERENCES:
patent: 4930439 (1990-06-01), Sano et al.
patent: 4958074 (1990-09-01), Wolf et al.
patent: 4983830 (1991-01-01), Iwasaki et al.

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