Ion-beam monitor

Details Ion-beam monitor Ion-beam monitor

1984-06-12

1986-02-11

Smith, Alfred E.

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

2504581, 2504922, 2504923, G01N 2322

Patent

active

045700702

ABSTRACT:
The ion-beam monitor determines the distribution of the ion beam intensity by scanning a flat pellet of Al.sub.2 O.sub.3 with the ion beam and detecting the ultra violet radiation emitted from the Al.sub.2 O.sub.3 pellet and recording the same at each step of the scanning operation.

REFERENCES:
patent: 3601575 (1971-08-01), Meyer et al.
patent: 4494005 (1985-01-01), Shibata et al.
EerNisse et al., "Ion Beam Profile Monitor", Rev. Sci. Instrum., 46 (3), Mar. 1975, pp. 266-267.

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