Electric heating – Metal heating – By arc
Patent
1979-09-24
1982-01-12
Albritto, C. L.
Electric heating
Metal heating
By arc
219121EM, 219121ER, 219121EX, B23K 1500
Patent
active
043107435
ABSTRACT:
A high-resolution high-throughput ion beam lithography process and apparatus for exposing a large area target by a step-and-repeat process which accommodates lateral wafer distortions in the target and optimizes the resolution, throughput, yield, and cost of the process. First there is provided: a target having predetermined segments defined thereon, with the area of each segment being chosen to optimize the resolution, throughput, yield, and cost of the process; a mask placed in proximity to said target, to define the patterned ion beam; a collimated ion beam with a diameter approximately equal to the diameter of the mask, which is projected through the mask to form the patterned ion beam; and a means for aligning the mask and a selected segment of the target. The size of the mask is equal to or larger than the size of one of the predetermined segments of the target and the pattern area of the mask is smaller than the area of one of the selected segments of the target. Next, the mask is aligned with a first selected segment of the target and this first segment is exposed to the patterned ion beam, formed by projecting the collimated ion beam through the mask. Then, the mask is aligned with a second selected segment of the target and this second segment is exposed to the patterned ion beam. Thus, selected segments of the target are exposed to the projected ion beam pattern in a step-and-repeat manner.
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Albritto C. L.
Hughes Aircraft Company
Lachman Mary E.
MacAllister W. H.
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