Ion beam irradiation apparatus

Details Ion beam irradiation apparatus Ion beam irradiation apparatus

2006-05-08

2008-10-21

Berman, Jack I. (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S491100, C250S492100

Reexamination Certificate

active

07439527

ABSTRACT:
Three axes that are orthogonal to each other at one point are taken as an X-axis, a Y-axis and a Z-axis. An irradiation angle setting motor holds a holder, and sets an irradiation angle θ of an ion beam by rotating this holder around a center axis that is parallel to the X-axis. A Y-axis linear motor causes the holder and the irradiation angle setting motor to ascend and descent in the direction of the Y-axis. A Z-axis linear motor moves the holder, the irradiation angle setting motor and the Y-axis linear motor in the direction of the Z-axis. A control unit operation-controls synchronously the Y-axis linear motor and the Z-axis linear motor so that a substrate holding surface of the holder reciprocates and scans linearly along an S-axis that is parallel to the substrate holding surface and orthogonal to the X-axis.

REFERENCES:
patent: 6559461 (2003-05-01), Seo
patent: 6740894 (2004-05-01), Mitchell
patent: 2006/0027763 (2006-02-01), Deak
patent: 2386469 (2003-09-01), None
patent: 01289060 (1989-11-01), None
patent: 10326590 (1998-08-01), None
patent: 2003-110012 (2003-04-01), None
patent: WO 99/13488 (1999-03-01), None

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