Ion beam irradiating apparatus including ion neutralizer

Details Ion beam irradiating apparatus including ion neutralizer Ion beam irradiating apparatus including ion neutralizer

1988-03-09

1989-12-12

Fields, Carolyn E.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

2504923, 250398, 250281, 250423R, 250309, 31511181, 3133591, 313341, H01J 3700, G21K 500

Patent

active

048869716

ABSTRACT:
In an ion beam irradiating apparatus, a specified ion beam is first deflected in a deflection direction perpendicular to an ion beam orbit by an ion beam deflector. The deflected ion beam is neutralized by a thermoelectron beam emitted from a filament of an ion neutralizer. An electrode is employed to control the supply of the thermoelectron beam to the deflected ion beam. Both the filament and control electrode elongated along the deflection direction surround the deflected ion beam traveled along the ion beam orbit.

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