Ion beam irradiating apparatus, and method of producing...

Details Ion beam irradiating apparatus, and method of producing... Ion beam irradiating apparatus, and method of producing...

2011-05-03

2011-05-03

Kim, Robert (Department: 2881)

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

C250S492100, C250S492200, C250S492210, C250S251000

Reexamination Certificate

active

07935944

ABSTRACT:
An ion beam irradiating apparatus has a field emission electron source10which is disposed in a vicinity of a path of the ion beam2, and which emits electrons12. The field emission electron source10is placed in a direction along which an incident angle formed by the electrons12emitted from the electron source10and a direction parallel to the traveling direction of the ion beam2is in the range from −15 deg. to +45 deg. (an inward direction of the ion beam2is +, and an outward direction is −).

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